@article{1339,
  abstract     = {We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive
actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By
measuring the resonance frequencies of the system, we show that the comb-drive actuator and the
silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate
(1.5 MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate (10%)
placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive
to either of them and changes only by 60.5%. Finally, we show that the comb-drive actuator
can be used to switch between different coupling rates with a frequency of at least 10 kHz.
},
  author       = {Verbiest, Gerard and Xu, Duo and Goldsche, Matthias and Khodkov, Timofiy and Barzanjeh, Shabir and Von Den Driesch, Nils and Buca, Dan and Stampfer, Christoph},
  journal      = {Applied Physics Letter},
  publisher    = {American Institute of Physics},
  title        = {{Tunable mechanical coupling between driven microelectromechanical resonators}},
  doi          = {10.1063/1.4964122},
  volume       = {109},
  year         = {2016},
}