@article{21646,
  abstract     = {Specimen preparation using abrasives results in surface and subsurface mechanical (stresses, strains), geometrical (roughness), chemical (contaminants, reaction products) and physical modifications (structure, texture, lattice defects). The mechanisms involved in polishing with abrasives are presented to illustrate the effects of surface topography, surface and subsurface composition and induced lattice defects on the accuracy of quantitative x-ray microanalysis of mineral materials with the electron probe microanalyzer (EPMA).},
  author       = {Remond, G. and Nockolds, C. and Phillips, M. and Roques-Carmes, Charles},
  issn         = {1044-677X},
  journal      = {Journal of Research of the National Institute of Standards and Technology},
  keywords     = {abrasive wear, bound abrasives, chemical-mechanical polishing, loose abrasives, polishing, surface and subsurface damage, x-ray microanalysis.},
  number       = {6},
  pages        = {639--662},
  publisher    = {National Institute of Standards and Technology},
  title        = {{Implications of polishing techniques in quantitative X-ray microanalysis}},
  doi          = {10.6028/jres.107.052},
  volume       = {107},
  year         = {2002},
}