{"author":[{"last_name":"Verbiest","full_name":"Verbiest, Gerard","first_name":"Gerard"},{"first_name":"Duo","id":"3454D55E-F248-11E8-B48F-1D18A9856A87","full_name":"Xu, Duo","last_name":"Xu"},{"first_name":"Matthias","full_name":"Goldsche, Matthias","last_name":"Goldsche"},{"full_name":"Khodkov, Timofiy","last_name":"Khodkov","first_name":"Timofiy"},{"full_name":"Barzanjeh, Shabir","last_name":"Barzanjeh","first_name":"Shabir","id":"2D25E1F6-F248-11E8-B48F-1D18A9856A87","orcid":"0000-0003-0415-1423"},{"first_name":"Nils","last_name":"Von Den Driesch","full_name":"Von Den Driesch, Nils"},{"full_name":"Buca, Dan","last_name":"Buca","first_name":"Dan"},{"last_name":"Stampfer","full_name":"Stampfer, Christoph","first_name":"Christoph"}],"date_published":"2016-10-04T00:00:00Z","main_file_link":[{"url":"https://arxiv.org/abs/1607.04406","open_access":"1"}],"type":"journal_article","article_number":"143507","year":"2016","day":"04","status":"public","publication":"Applied  Physics Letter","date_created":"2018-12-11T11:51:28Z","month":"10","date_updated":"2023-02-21T10:35:06Z","volume":109,"_id":"1339","title":"Tunable mechanical coupling between driven microelectromechanical resonators","quality_controlled":"1","department":[{"_id":"JoFi"}],"user_id":"3E5EF7F0-F248-11E8-B48F-1D18A9856A87","intvolume":"       109","publisher":"American Institute of Physics","publist_id":"5928","abstract":[{"lang":"eng","text":"We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive\r\nactuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By\r\nmeasuring the resonance frequencies of the system, we show that the comb-drive actuator and the\r\nsilicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate\r\n(1.5 MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate (10%)\r\nplaced close to the silicon beam. In contrast, the effective spring constant of the system is insensitive\r\nto either of them and changes only by 60.5%. Finally, we show that the comb-drive actuator\r\ncan be used to switch between different coupling rates with a frequency of at least 10 kHz.\r\n"}],"language":[{"iso":"eng"}],"oa_version":"Preprint","oa":1,"citation":{"mla":"Verbiest, Gerard, et al. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” <i>Applied  Physics Letter</i>, vol. 109, 143507, American Institute of Physics, 2016, doi:<a href=\"https://doi.org/10.1063/1.4964122\">10.1063/1.4964122</a>.","ista":"Verbiest G, Xu D, Goldsche M, Khodkov T, Barzanjeh S, Von Den Driesch N, Buca D, Stampfer C. 2016. Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. 109, 143507.","short":"G. Verbiest, D. Xu, M. Goldsche, T. Khodkov, S. Barzanjeh, N. Von Den Driesch, D. Buca, C. Stampfer, Applied  Physics Letter 109 (2016).","apa":"Verbiest, G., Xu, D., Goldsche, M., Khodkov, T., Barzanjeh, S., Von Den Driesch, N., … Stampfer, C. (2016). Tunable mechanical coupling between driven microelectromechanical resonators. <i>Applied  Physics Letter</i>. American Institute of Physics. <a href=\"https://doi.org/10.1063/1.4964122\">https://doi.org/10.1063/1.4964122</a>","ieee":"G. Verbiest <i>et al.</i>, “Tunable mechanical coupling between driven microelectromechanical resonators,” <i>Applied  Physics Letter</i>, vol. 109. American Institute of Physics, 2016.","ama":"Verbiest G, Xu D, Goldsche M, et al. Tunable mechanical coupling between driven microelectromechanical resonators. <i>Applied  Physics Letter</i>. 2016;109. doi:<a href=\"https://doi.org/10.1063/1.4964122\">10.1063/1.4964122</a>","chicago":"Verbiest, Gerard, Duo Xu, Matthias Goldsche, Timofiy Khodkov, Shabir Barzanjeh, Nils Von Den Driesch, Dan Buca, and Christoph Stampfer. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” <i>Applied  Physics Letter</i>. American Institute of Physics, 2016. <a href=\"https://doi.org/10.1063/1.4964122\">https://doi.org/10.1063/1.4964122</a>."},"publication_status":"published","doi":"10.1063/1.4964122","scopus_import":1,"acknowledgement":"We acknowledge the support from the Helmholtz Nanoelectronic Facility (HNF) and funding from the ERC (GA-Nr. 280140)."}