---
_id: '1339'
abstract:
- lang: eng
text: "We present a microelectromechanical system, in which a silicon beam is attached
to a comb-drive\r\nactuator, which is used to tune the tension in the silicon
beam and thus its resonance frequency. By\r\nmeasuring the resonance frequencies
of the system, we show that the comb-drive actuator and the\r\nsilicon beam behave
as two strongly coupled resonators. Interestingly, the effective coupling rate\r\n(1.5
MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate
(10%)\r\nplaced close to the silicon beam. In contrast, the effective spring constant
of the system is insensitive\r\nto either of them and changes only by 60.5%. Finally,
we show that the comb-drive actuator\r\ncan be used to switch between different
coupling rates with a frequency of at least 10 kHz.\r\n"
acknowledgement: We acknowledge the support from the Helmholtz Nanoelectronic Facility
(HNF) and funding from the ERC (GA-Nr. 280140).
article_number: '143507'
author:
- first_name: Gerard
full_name: Verbiest, Gerard
last_name: Verbiest
- first_name: Duo
full_name: Xu, Duo
id: 3454D55E-F248-11E8-B48F-1D18A9856A87
last_name: Xu
- first_name: Matthias
full_name: Goldsche, Matthias
last_name: Goldsche
- first_name: Timofiy
full_name: Khodkov, Timofiy
last_name: Khodkov
- first_name: Shabir
full_name: Barzanjeh, Shabir
id: 2D25E1F6-F248-11E8-B48F-1D18A9856A87
last_name: Barzanjeh
orcid: 0000-0003-0415-1423
- first_name: Nils
full_name: Von Den Driesch, Nils
last_name: Von Den Driesch
- first_name: Dan
full_name: Buca, Dan
last_name: Buca
- first_name: Christoph
full_name: Stampfer, Christoph
last_name: Stampfer
citation:
ama: Verbiest G, Xu D, Goldsche M, et al. Tunable mechanical coupling between driven
microelectromechanical resonators. Applied Physics Letter. 2016;109. doi:10.1063/1.4964122
apa: Verbiest, G., Xu, D., Goldsche, M., Khodkov, T., Barzanjeh, S., Von Den Driesch,
N., … Stampfer, C. (2016). Tunable mechanical coupling between driven microelectromechanical
resonators. Applied Physics Letter. American Institute of Physics. https://doi.org/10.1063/1.4964122
chicago: Verbiest, Gerard, Duo Xu, Matthias Goldsche, Timofiy Khodkov, Shabir Barzanjeh,
Nils Von Den Driesch, Dan Buca, and Christoph Stampfer. “Tunable Mechanical Coupling
between Driven Microelectromechanical Resonators.” Applied Physics Letter.
American Institute of Physics, 2016. https://doi.org/10.1063/1.4964122.
ieee: G. Verbiest et al., “Tunable mechanical coupling between driven microelectromechanical
resonators,” Applied Physics Letter, vol. 109. American Institute of Physics,
2016.
ista: Verbiest G, Xu D, Goldsche M, Khodkov T, Barzanjeh S, Von Den Driesch N, Buca
D, Stampfer C. 2016. Tunable mechanical coupling between driven microelectromechanical
resonators. Applied Physics Letter. 109, 143507.
mla: Verbiest, Gerard, et al. “Tunable Mechanical Coupling between Driven Microelectromechanical
Resonators.” Applied Physics Letter, vol. 109, 143507, American Institute
of Physics, 2016, doi:10.1063/1.4964122.
short: G. Verbiest, D. Xu, M. Goldsche, T. Khodkov, S. Barzanjeh, N. Von Den Driesch,
D. Buca, C. Stampfer, Applied Physics Letter 109 (2016).
date_created: 2018-12-11T11:51:28Z
date_published: 2016-10-04T00:00:00Z
date_updated: 2023-02-21T10:35:06Z
day: '04'
department:
- _id: JoFi
doi: 10.1063/1.4964122
intvolume: ' 109'
language:
- iso: eng
main_file_link:
- open_access: '1'
url: https://arxiv.org/abs/1607.04406
month: '10'
oa: 1
oa_version: Preprint
publication: Applied Physics Letter
publication_status: published
publisher: American Institute of Physics
publist_id: '5928'
quality_controlled: '1'
scopus_import: 1
status: public
title: Tunable mechanical coupling between driven microelectromechanical resonators
type: journal_article
user_id: 3E5EF7F0-F248-11E8-B48F-1D18A9856A87
volume: 109
year: '2016'
...