--- _id: '1339' abstract: - lang: eng text: "We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive\r\nactuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By\r\nmeasuring the resonance frequencies of the system, we show that the comb-drive actuator and the\r\nsilicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate\r\n(1.5 MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate (10%)\r\nplaced close to the silicon beam. In contrast, the effective spring constant of the system is insensitive\r\nto either of them and changes only by 60.5%. Finally, we show that the comb-drive actuator\r\ncan be used to switch between different coupling rates with a frequency of at least 10 kHz.\r\n" acknowledgement: We acknowledge the support from the Helmholtz Nanoelectronic Facility (HNF) and funding from the ERC (GA-Nr. 280140). article_number: '143507' author: - first_name: Gerard full_name: Verbiest, Gerard last_name: Verbiest - first_name: Duo full_name: Xu, Duo id: 3454D55E-F248-11E8-B48F-1D18A9856A87 last_name: Xu - first_name: Matthias full_name: Goldsche, Matthias last_name: Goldsche - first_name: Timofiy full_name: Khodkov, Timofiy last_name: Khodkov - first_name: Shabir full_name: Barzanjeh, Shabir id: 2D25E1F6-F248-11E8-B48F-1D18A9856A87 last_name: Barzanjeh orcid: 0000-0003-0415-1423 - first_name: Nils full_name: Von Den Driesch, Nils last_name: Von Den Driesch - first_name: Dan full_name: Buca, Dan last_name: Buca - first_name: Christoph full_name: Stampfer, Christoph last_name: Stampfer citation: ama: Verbiest G, Xu D, Goldsche M, et al. Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. 2016;109. doi:10.1063/1.4964122 apa: Verbiest, G., Xu, D., Goldsche, M., Khodkov, T., Barzanjeh, S., Von Den Driesch, N., … Stampfer, C. (2016). Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. American Institute of Physics. https://doi.org/10.1063/1.4964122 chicago: Verbiest, Gerard, Duo Xu, Matthias Goldsche, Timofiy Khodkov, Shabir Barzanjeh, Nils Von Den Driesch, Dan Buca, and Christoph Stampfer. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” Applied  Physics Letter. American Institute of Physics, 2016. https://doi.org/10.1063/1.4964122. ieee: G. Verbiest et al., “Tunable mechanical coupling between driven microelectromechanical resonators,” Applied  Physics Letter, vol. 109. American Institute of Physics, 2016. ista: Verbiest G, Xu D, Goldsche M, Khodkov T, Barzanjeh S, Von Den Driesch N, Buca D, Stampfer C. 2016. Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. 109, 143507. mla: Verbiest, Gerard, et al. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” Applied  Physics Letter, vol. 109, 143507, American Institute of Physics, 2016, doi:10.1063/1.4964122. short: G. Verbiest, D. Xu, M. Goldsche, T. Khodkov, S. Barzanjeh, N. Von Den Driesch, D. Buca, C. Stampfer, Applied  Physics Letter 109 (2016). date_created: 2018-12-11T11:51:28Z date_published: 2016-10-04T00:00:00Z date_updated: 2023-02-21T10:35:06Z day: '04' department: - _id: JoFi doi: 10.1063/1.4964122 intvolume: ' 109' language: - iso: eng main_file_link: - open_access: '1' url: https://arxiv.org/abs/1607.04406 month: '10' oa: 1 oa_version: Preprint publication: Applied Physics Letter publication_status: published publisher: American Institute of Physics publist_id: '5928' quality_controlled: '1' scopus_import: 1 status: public title: Tunable mechanical coupling between driven microelectromechanical resonators type: journal_article user_id: 3E5EF7F0-F248-11E8-B48F-1D18A9856A87 volume: 109 year: '2016' ...