[{"issue":"1","abstract":[{"lang":"eng"}],"type":"journal_article","oa_version":"Preprint","intvolume":" 6","status":"public","user_id":"3E5EF7F0-F248-11E8-B48F-1D18A9856A87","_id":"1354","uri_base":"https://research-explorer.ista.ac.at","day":"22","scopus_import":1,"dc":{"date":["2016"],"language":["eng"],"source":["Dieterle P, Kalaee M, Fink JM, Painter O. Superconducting cavity electromechanics on a silicon-on-insulator platform. Physical Review Applied. 2016;6(1). doi:10.1103/PhysRevApplied.6.014013"],"rights":["info:eu-repo/semantics/openAccess"],"title":["Superconducting cavity electromechanics on a silicon-on-insulator platform"],"publisher":["American Physical Society"],"relation":["info:eu-repo/semantics/altIdentifier/doi/10.1103/PhysRevApplied.6.014013"],"creator":["Dieterle, Paul","Kalaee, Mahmoud","Fink, Johannes M","Painter, Oskar"],"type":["info:eu-repo/semantics/article","doc-type:article","text","http://purl.org/coar/resource_type/c_6501"],"identifier":["https://research-explorer.ista.ac.at/record/1354"],"description":["Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-Q aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this fabrication process, a high-impedance 8.9-GHz coil resonator is coupled capacitively with a large participation ratio to a 9.7-MHz micromechanical resonator. Two-tone microwave spectroscopy and radiation pressure backaction are used to characterize the coupled system in a dilution refrigerator down to temperatures of Tf=11 mK, yielding a measured electromechanical vacuum coupling rate of g0/2π=24.6 Hz and a mechanical resonator Q factor of Qm=1.7×107. Microwave backaction cooling of the mechanical resonator is also studied, with a minimum phonon occupancy of nm≈16 phonons being realized at an elevated fridge temperature of Tf=211 mK."]},"date_published":"2016-07-22T00:00:00Z","citation":{"ista":"Dieterle P, Kalaee M, Fink JM, Painter O. 2016. Superconducting cavity electromechanics on a silicon-on-insulator platform. Physical Review Applied. 6(1), 014013.","ieee":"P. Dieterle, M. Kalaee, J. M. Fink, and O. Painter, “Superconducting cavity electromechanics on a silicon-on-insulator platform,” Physical Review Applied, vol. 6, no. 1. American Physical Society, 2016.","apa":"Dieterle, P., Kalaee, M., Fink, J. M., & Painter, O. (2016). Superconducting cavity electromechanics on a silicon-on-insulator platform. Physical Review Applied. American Physical Society. https://doi.org/10.1103/PhysRevApplied.6.014013","mla":"Dieterle, Paul, et al. “Superconducting Cavity Electromechanics on a Silicon-on-Insulator Platform.” Physical Review Applied, vol. 6, no. 1, 014013, American Physical Society, 2016, doi:10.1103/PhysRevApplied.6.014013.","short":"P. Dieterle, M. Kalaee, J.M. Fink, O. Painter, Physical Review Applied 6 (2016).","chicago":"Dieterle, Paul, Mahmoud Kalaee, Johannes M Fink, and Oskar Painter. “Superconducting Cavity Electromechanics on a Silicon-on-Insulator Platform.” Physical Review Applied. American Physical Society, 2016. https://doi.org/10.1103/PhysRevApplied.6.014013."},"publication":"Physical Review Applied","creator":{"id":"3E5EF7F0-F248-11E8-B48F-1D18A9856A87","login":"kschuh"},"publist_id":"5892","article_number":"014013","volume":6,"dini_type":"doc-type:article","date_created":"2018-12-11T11:51:32Z","date_updated":"2021-01-12T06:50:06Z","author":[{"first_name":"Paul","last_name":"Dieterle"},{"last_name":"Kalaee","first_name":"Mahmoud"},{"orcid":"0000-0001-8112-028X","id":"4B591CBA-F248-11E8-B48F-1D18A9856A87","last_name":"Fink","first_name":"Johannes M"},{"last_name":"Painter","first_name":"Oskar"}],"department":[{"_id":"JoFi","tree":[{"_id":"ResearchGroups"},{"_id":"IST"}]}],"publication_status":"published","month":"07","language":[{}],"quality_controlled":"1","main_file_link":[{"url":"http://arxiv.org/abs/1601.04019","open_access":"1"}],"oa":1}]