Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity Pitanti, Alessandro Johannes Fink ; https://orcid.org/0000-0001-8112-028X Safavi-Naeini, Amir H Hill, Jeff T Lei, Chan U Tredicucci, Alessandro Painter, Oskar J We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental ωm=2π = 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion. Optical Society of America 2015 info:eu-repo/semantics/article doc-type:article text http://purl.org/coar/resource_type/c_2df8fbb1 https://research-explorer.ista.ac.at/record/1788 Pitanti A, Fink JM, Safavi Naeini A, et al. Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. <i>Optics Express</i>. 2015;23(3):3196-3208. doi:<a href="https://doi.org/10.1364/OE.23.003196">10.1364/OE.23.003196</a> info:eu-repo/semantics/altIdentifier/doi/10.1364/OE.23.003196 info:eu-repo/semantics/closedAccess