---
res:
  bibo_abstract:
  - Planar germanium is currently the only semiconducting platform where high-coherence
    spin qubits and proximity-induced superconductivity have each been demonstrated.
    Recent research into spin qubits in Ge/SiGe heterostructures has focused on increasing
    the thickness of the SiGe capping layer, reporting improvements in the electrostatic
    noise levels. Meanwhile, heterostructures with thinner capping layers remain rather
    unexplored, despite the potential advantages for proximity-induced superconductivity.
    Here, we study a Ge/SiGe heterostructure with a thin SiGe cap d - 4nm and investigate
    its viability to host low-noise quantum dots. To keep the thermal budget compatible
    with superconducting layers, low-temperature oxide deposition processes were developed
    and implemented for the gate dielectrics. The charge noise level of the fabricated
    devices is estimated to be 1.8  +- 1.0 μeV/ square HZ⁠, comparable to devices
    fabricated on shallow heterostructures (⁠ d - 20nm⁠) with high-temperature deposited
    oxides. Low charge noise levels, together with the straightforward integration
    of superconductors, make this heterostructure an attractive platform for prototyping
    hybrid semiconducting–superconducting devices.@eng
  bibo_authorlist:
  - foaf_Person:
      foaf_givenName: Maksim
      foaf_name: Borovkov, Maksim
      foaf_surname: Borovkov
      foaf_workInfoHomepage: http://www.librecat.org/personId=1fd0975f-8b61-11ed-b69e-d149334f28c5
  - foaf_Person:
      foaf_givenName: Yona A
      foaf_name: Schell, Yona A
      foaf_surname: Schell
      foaf_workInfoHomepage: http://www.librecat.org/personId=fe39122d-06bb-11ec-a33b-9e22b40e40a5
  - foaf_Person:
      foaf_givenName: Dina
      foaf_name: Sokolova, Dina
      foaf_surname: Sokolova
      foaf_workInfoHomepage: http://www.librecat.org/personId=2d2d62f8-72f0-11ef-b75a-8ec3e8a60032
  - foaf_Person:
      foaf_givenName: Kevin Etienne Robert
      foaf_name: Roux, Kevin Etienne Robert
      foaf_surname: Roux
      foaf_workInfoHomepage: http://www.librecat.org/personId=53f93ea2-803f-11ed-ab7e-b283135794ef
  - foaf_Person:
      foaf_givenName: Paul
      foaf_name: Falthansl-Scheinecker, Paul
      foaf_surname: Falthansl-Scheinecker
      foaf_workInfoHomepage: http://www.librecat.org/personId=85b43b21-15b2-11ec-abd3-e2c252cc2285
  - foaf_Person:
      foaf_givenName: Giorgio
      foaf_name: Fabris, Giorgio
      foaf_surname: Fabris
      foaf_workInfoHomepage: http://www.librecat.org/personId=298cf6f3-1ff6-11ee-9fa6-d94cfa0b3352
  - foaf_Person:
      foaf_givenName: Devashish C
      foaf_name: Shah, Devashish C
      foaf_surname: Shah
      foaf_workInfoHomepage: http://www.librecat.org/personId=de191434-4e7e-11ef-bf4b-9a056fc19fc3
    orcid: 0009-0007-5829-7707
  - foaf_Person:
      foaf_givenName: Jaime
      foaf_name: Saez Mollejo, Jaime
      foaf_surname: Saez Mollejo
      foaf_workInfoHomepage: http://www.librecat.org/personId=e0390f72-f6e0-11ea-865d-862393336714
  - foaf_Person:
      foaf_givenName: Rodolfo
      foaf_name: Previdi, Rodolfo
      foaf_surname: Previdi
      foaf_workInfoHomepage: http://www.librecat.org/personId=bc4ea1dc-00ce-11ec-8a4e-b325ca8b9876
  - foaf_Person:
      foaf_givenName: Inas
      foaf_name: Taha, Inas
      foaf_surname: Taha
  - foaf_Person:
      foaf_givenName: Aziz
      foaf_name: Genç, Aziz
      foaf_surname: Genç
  - foaf_Person:
      foaf_givenName: Jordi
      foaf_name: Arbiol, Jordi
      foaf_surname: Arbiol
  - foaf_Person:
      foaf_givenName: Stefano
      foaf_name: Calcaterra, Stefano
      foaf_surname: Calcaterra
  - foaf_Person:
      foaf_givenName: Afonso De Cerdeira
      foaf_name: Oliveira, Afonso De Cerdeira
      foaf_surname: Oliveira
  - foaf_Person:
      foaf_givenName: Daniel
      foaf_name: Chrastina, Daniel
      foaf_surname: Chrastina
  - foaf_Person:
      foaf_givenName: Giovanni
      foaf_name: Isella, Giovanni
      foaf_surname: Isella
  - foaf_Person:
      foaf_givenName: Anton
      foaf_name: Bubis, Anton
      foaf_surname: Bubis
      foaf_workInfoHomepage: http://www.librecat.org/personId=1f6212b5-f795-11ec-9c0c-de4780302890
  - foaf_Person:
      foaf_givenName: Georgios
      foaf_name: Katsaros, Georgios
      foaf_surname: Katsaros
      foaf_workInfoHomepage: http://www.librecat.org/personId=38DB5788-F248-11E8-B48F-1D18A9856A87
    orcid: 0000-0001-8342-202X
  bibo_doi: 10.1063/5.0333142
  bibo_issue: '3'
  bibo_volume: 129
  dct_date: 2026^xs_gYear
  dct_isPartOf:
  - http://id.crossref.org/issn/0003-6951
  - http://id.crossref.org/issn/1077-3118
  dct_language: eng
  dct_publisher: AIP Publishing@
  dct_title: Low-noise quantum dots in ultra-shallow Ge/SiGe heterostructures for
    prototyping hybrid semiconducting–superconducting devices@
...
