article published yes Matthias Brauns author 33F94E3C-F248-11E8-B48F-1D18A9856A87 Sergey Amitonov author Paul Spruijtenburg author Floris Zwanenburg author GeKa department We replace the established aluminium gates for the formation of quantum dots in silicon with gates made from palladium. We study the morphology of both aluminium and palladium gates with transmission electron microscopy. The native aluminium oxide is found to be formed all around the aluminium gates, which could lead to the formation of unintentional dots. Therefore, we report on a novel fabrication route that replaces aluminium and its native oxide by palladium with atomic-layer-deposition-grown aluminium oxide. Using this approach, we show the formation of low-disorder gate-defined quantum dots, which are reproducibly fabricated. Furthermore, palladium enables us to further shrink the gate design, allowing us to perform electron transport measurements in the few-electron regime in devices comprising only two gate layers, a major technological advancement. It remains to be seen, whether the introduction of palladium gates can improve the excellent results on electron and nuclear spin qubits defined with an aluminium gate stack. https://research-explorer.ista.ac.at/download/317/5256/IST-2018-1016-v1+1_2018_Brauns_Palladium_gates.pdf application/pdfno Nature Publishing Group2018 eng 00042940430001310.1038/s41598-018-24004-y 81 M. Brauns, S. Amitonov, P. Spruijtenburg, F. Zwanenburg, Scientific Reports 8 (2018). Brauns M, Amitonov S, Spruijtenburg P, Zwanenburg F. Palladium gates for reproducible quantum dots in silicon. <i>Scientific Reports</i>. 2018;8(1). doi:<a href="https://doi.org/10.1038/s41598-018-24004-y">10.1038/s41598-018-24004-y</a> Brauns M, Amitonov S, Spruijtenburg P, Zwanenburg F. 2018. Palladium gates for reproducible quantum dots in silicon. Scientific Reports. 8(1), 5690. Brauns, Matthias, Sergey Amitonov, Paul Spruijtenburg, and Floris Zwanenburg. “Palladium Gates for Reproducible Quantum Dots in Silicon.” <i>Scientific Reports</i>. Nature Publishing Group, 2018. <a href="https://doi.org/10.1038/s41598-018-24004-y">https://doi.org/10.1038/s41598-018-24004-y</a>. Brauns, M., Amitonov, S., Spruijtenburg, P., &#38; Zwanenburg, F. (2018). Palladium gates for reproducible quantum dots in silicon. <i>Scientific Reports</i>. Nature Publishing Group. <a href="https://doi.org/10.1038/s41598-018-24004-y">https://doi.org/10.1038/s41598-018-24004-y</a> M. Brauns, S. Amitonov, P. Spruijtenburg, and F. Zwanenburg, “Palladium gates for reproducible quantum dots in silicon,” <i>Scientific Reports</i>, vol. 8, no. 1. Nature Publishing Group, 2018. Brauns, Matthias, et al. “Palladium Gates for Reproducible Quantum Dots in Silicon.” <i>Scientific Reports</i>, vol. 8, no. 1, 5690, Nature Publishing Group, 2018, doi:<a href="https://doi.org/10.1038/s41598-018-24004-y">10.1038/s41598-018-24004-y</a>. 3172018-12-11T11:45:47Z2024-10-09T20:58:34Z