---
_id: '317'
abstract:
- lang: eng
  text: We replace the established aluminium gates for the formation of quantum dots
    in silicon with gates made from palladium. We study the morphology of both aluminium
    and palladium gates with transmission electron microscopy. The native aluminium
    oxide is found to be formed all around the aluminium gates, which could lead to
    the formation of unintentional dots. Therefore, we report on a novel fabrication
    route that replaces aluminium and its native oxide by palladium with atomic-layer-deposition-grown
    aluminium oxide. Using this approach, we show the formation of low-disorder gate-defined
    quantum dots, which are reproducibly fabricated. Furthermore, palladium enables
    us to further shrink the gate design, allowing us to perform electron transport
    measurements in the few-electron regime in devices comprising only two gate layers,
    a major technological advancement. It remains to be seen, whether the introduction
    of palladium gates can improve the excellent results on electron and nuclear spin
    qubits defined with an aluminium gate stack.
article_number: '5690'
article_processing_charge: No
author:
- first_name: Matthias
  full_name: Brauns, Matthias
  id: 33F94E3C-F248-11E8-B48F-1D18A9856A87
  last_name: Brauns
- first_name: Sergey
  full_name: Amitonov, Sergey
  last_name: Amitonov
- first_name: Paul
  full_name: Spruijtenburg, Paul
  last_name: Spruijtenburg
- first_name: Floris
  full_name: Zwanenburg, Floris
  last_name: Zwanenburg
citation:
  ama: Brauns M, Amitonov S, Spruijtenburg P, Zwanenburg F. Palladium gates for reproducible
    quantum dots in silicon. <i>Scientific Reports</i>. 2018;8(1). doi:<a href="https://doi.org/10.1038/s41598-018-24004-y">10.1038/s41598-018-24004-y</a>
  apa: Brauns, M., Amitonov, S., Spruijtenburg, P., &#38; Zwanenburg, F. (2018). Palladium
    gates for reproducible quantum dots in silicon. <i>Scientific Reports</i>. Nature
    Publishing Group. <a href="https://doi.org/10.1038/s41598-018-24004-y">https://doi.org/10.1038/s41598-018-24004-y</a>
  chicago: Brauns, Matthias, Sergey Amitonov, Paul Spruijtenburg, and Floris Zwanenburg.
    “Palladium Gates for Reproducible Quantum Dots in Silicon.” <i>Scientific Reports</i>.
    Nature Publishing Group, 2018. <a href="https://doi.org/10.1038/s41598-018-24004-y">https://doi.org/10.1038/s41598-018-24004-y</a>.
  ieee: M. Brauns, S. Amitonov, P. Spruijtenburg, and F. Zwanenburg, “Palladium gates
    for reproducible quantum dots in silicon,” <i>Scientific Reports</i>, vol. 8,
    no. 1. Nature Publishing Group, 2018.
  ista: Brauns M, Amitonov S, Spruijtenburg P, Zwanenburg F. 2018. Palladium gates
    for reproducible quantum dots in silicon. Scientific Reports. 8(1), 5690.
  mla: Brauns, Matthias, et al. “Palladium Gates for Reproducible Quantum Dots in
    Silicon.” <i>Scientific Reports</i>, vol. 8, no. 1, 5690, Nature Publishing Group,
    2018, doi:<a href="https://doi.org/10.1038/s41598-018-24004-y">10.1038/s41598-018-24004-y</a>.
  short: M. Brauns, S. Amitonov, P. Spruijtenburg, F. Zwanenburg, Scientific Reports
    8 (2018).
corr_author: '1'
date_created: 2018-12-11T11:45:47Z
date_published: 2018-04-09T00:00:00Z
date_updated: 2024-10-09T20:58:34Z
day: '09'
ddc:
- '539'
department:
- _id: GeKa
doi: 10.1038/s41598-018-24004-y
external_id:
  isi:
  - '000429404300013'
file:
- access_level: open_access
  checksum: 20af238ca4ba6491b77270be8d826bf5
  content_type: application/pdf
  creator: system
  date_created: 2018-12-12T10:17:04Z
  date_updated: 2020-07-14T12:46:02Z
  file_id: '5256'
  file_name: IST-2018-1016-v1+1_2018_Brauns_Palladium_gates.pdf
  file_size: 1850530
  relation: main_file
file_date_updated: 2020-07-14T12:46:02Z
has_accepted_license: '1'
intvolume: '         8'
isi: 1
issue: '1'
language:
- iso: eng
month: '04'
oa: 1
oa_version: Published Version
publication: Scientific Reports
publication_status: published
publisher: Nature Publishing Group
publist_id: '7548'
pubrep_id: '1016'
quality_controlled: '1'
scopus_import: '1'
status: public
title: Palladium gates for reproducible quantum dots in silicon
tmp:
  image: /images/cc_by.png
  legal_code_url: https://creativecommons.org/licenses/by/4.0/legalcode
  name: Creative Commons Attribution 4.0 International Public License (CC-BY 4.0)
  short: CC BY (4.0)
type: journal_article
user_id: c635000d-4b10-11ee-a964-aac5a93f6ac1
volume: 8
year: '2018'
...