{"issue":"4","publisher":"American Institute of Physics","publication_identifier":{"issn":["00036951"]},"abstract":[{"lang":"eng","text":"We present the fabrication and characterization of an aluminum transmon qubit on a silicon-on-insulator substrate. Key to the qubit fabrication is the use of an anhydrous hydrofluoric vapor process which selectively removes the lossy silicon oxide buried underneath the silicon device layer. For a 5.6 GHz qubit measured dispersively by a 7.1 GHz resonator, we find T1 = 3.5 μs and T∗2 = 2.2 μs. This process in principle permits the co-fabrication of silicon photonic and mechanical elements, providing a route towards chip-scale integration of electro-opto-mechanical transducers for quantum networking of superconducting microwave quantum circuits. The additional processing steps are compatible with established fabrication techniques for aluminum transmon qubits on silicon."}],"year":"2017","department":[{"_id":"JoFi"}],"oa_version":"Submitted Version","status":"public","date_created":"2018-12-11T11:48:33Z","article_number":"042603","type":"journal_article","citation":{"apa":"Keller, A. J., Dieterle, P., Fang, M., Berger, B., Fink, J. M., & Painter, O. (2017). Al transmon qubits on silicon on insulator for quantum device integration. Applied Physics Letters. American Institute of Physics. https://doi.org/10.1063/1.4994661","chicago":"Keller, Andrew J, Paul Dieterle, Michael Fang, Brett Berger, Johannes M Fink, and Oskar Painter. “Al Transmon Qubits on Silicon on Insulator for Quantum Device Integration.” Applied Physics Letters. American Institute of Physics, 2017. https://doi.org/10.1063/1.4994661.","mla":"Keller, Andrew J., et al. “Al Transmon Qubits on Silicon on Insulator for Quantum Device Integration.” Applied Physics Letters, vol. 111, no. 4, 042603, American Institute of Physics, 2017, doi:10.1063/1.4994661.","ieee":"A. J. Keller, P. Dieterle, M. Fang, B. Berger, J. M. Fink, and O. Painter, “Al transmon qubits on silicon on insulator for quantum device integration,” Applied Physics Letters, vol. 111, no. 4. American Institute of Physics, 2017.","ama":"Keller AJ, Dieterle P, Fang M, Berger B, Fink JM, Painter O. Al transmon qubits on silicon on insulator for quantum device integration. Applied Physics Letters. 2017;111(4). doi:10.1063/1.4994661","ista":"Keller AJ, Dieterle P, Fang M, Berger B, Fink JM, Painter O. 2017. Al transmon qubits on silicon on insulator for quantum device integration. Applied Physics Letters. 111(4), 042603.","short":"A.J. Keller, P. Dieterle, M. Fang, B. Berger, J.M. Fink, O. Painter, Applied Physics Letters 111 (2017)."},"acknowledgement":"This work was supported by the AFOSR MURI Quantum Photonic Matter (Grant No. 16RT0696), the AFOSR MURI Wiring Quantum Networks with Mechanical Transducers (Grant No. FA9550-15-1-0015), the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center (Grant No. PHY-1125565) with the support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. A.J.K. acknowledges the IQIM Postdoctoral Fellowship.","date_updated":"2023-09-27T12:13:36Z","month":"07","title":"Al transmon qubits on silicon on insulator for quantum device integration","scopus_import":"1","article_processing_charge":"No","isi":1,"language":[{"iso":"eng"}],"publist_id":"6857","quality_controlled":"1","intvolume":" 111","main_file_link":[{"open_access":"1","url":"https://arxiv.org/abs/1703.10195"}],"oa":1,"user_id":"c635000d-4b10-11ee-a964-aac5a93f6ac1","day":"01","publication_status":"published","publication":"Applied Physics Letters","date_published":"2017-07-01T00:00:00Z","_id":"796","volume":111,"author":[{"full_name":"Keller, Andrew J","last_name":"Keller","first_name":"Andrew J"},{"last_name":"Dieterle","full_name":"Dieterle, Paul","first_name":"Paul"},{"last_name":"Fang","full_name":"Fang, Michael","first_name":"Michael"},{"first_name":"Brett","full_name":"Berger, Brett","last_name":"Berger"},{"orcid":"0000-0001-8112-028X","id":"4B591CBA-F248-11E8-B48F-1D18A9856A87","last_name":"Fink","full_name":"Fink, Johannes M","first_name":"Johannes M"},{"first_name":"Oskar","last_name":"Painter","full_name":"Painter, Oskar"}],"doi":"10.1063/1.4994661","external_id":{"isi":["000406779700031"]}}